\ubbf8\uad6d\u00a0\ucf54\ub12c\ub300\ud559\uad50\u00a0\uc5f0\uad6c\uc9c4\uc774\u00a0\uc8fc\uc704\u00a0\ud658\uacbd\uc758\u00a0\ud654\ud559\uc801\u00a0\uc870\uc131\u00a0\ubc0f\u00a0\uc628\ub3c4\u00a0\ubcc0\ud654\ub97c\u00a0\uac10\uc9c0\ud574\u00a0\ube60\ub974\uac8c\u00a0\ud615\ud0dc\ub97c\u00a0\ubc14\uafc0\u00a0\uc218\u00a0\uc788\ub294\u00a0\ub85c\ubd07\u00a0\uc678\uace8\uaca9\uc744\u00a0\uc81c\uc791\ud558\ub294\ub370\u00a0\uc131\uacf5\ud588\ub2e4.\u00a0\ucf54\ub12c\u00a0\ud06c\ub85c\ub2c8\uceec\uc758\u00a0\uae30\uc790\u00a0\ud1b0\u00a0\ud50c\ub77c\uc774\uc2dc\ub9cc\uc5d0\u00a0\uc758\ud558\uba74,\u00a0\u201c\uadf8\ub4e4\uc740\u00a0\uc774\u00a0\ub098\ub178\u00a0\uaddc\ubaa8\uc758\u00a0\uae30\uacc4\uac00\u00a0\ubbf8\uc0dd\ubb3c\ud559\u00a0\ubd84\uc57c\uc5d0\uc11c\u00a0\uac15\ub825\ud55c\u00a0\ub85c\ubd07\u00a0\ud50c\ub7ab\ud3fc\uc73c\ub85c\u00a0\uae30\ub2a5\ud560\u00a0\uc218\u00a0\uc788\uc744\u00a0\uac83\u201d\uc774\ub77c\uace0\u00a0\uc8fc\uc7a5\ud588\ub2e4.\u00a0<\/b><\/p>\n <\/p>\n \ub098\ub178\u00a0\uaddc\ubaa8\uc758\u00a0\uc885\uc774\u00a0\ub85c\ubd07\u00a0<\/b><\/span><\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n <\/p>\n \uc5f0\uad6c\uc9c4\uc740 \uc6d0\uc790 \uaddc\ubaa8\ub85c \uc587\uc740 \uc885\uc774\ub97c \uc811\uc5b4\uc11c \uc138\ud3ec \ud06c\uae30\uc758 \uc885\uc774 \uae30\uacc4\ub97c \uac1c\ubc1c\ud588\ub2e4. \uadf8 \uc911\uc2ec\uc5d0\ub294 \uadf8\ub798\ud540\uacfc \ud55c \uacb9\uc758 \uc720\ub9ac \ub098\ub178\uce35\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9c4 \uad6c\ub3d9\uae30\uac00 \uc788\ub2e4.<\/span><\/p>\n \uc885\uc774\uc811\uae30\u00a0\ubc29\uc2dd\uc758\u00a0\uc81c\uc791\ubc95\uc740\u00a0\uba87\u00a0\uac00\uc9c0\u00a0\uc774\uc720\uc5d0\uc11c\u00a0\ub85c\ubd07\uc758\u00a0\uc18c\ud615\ud654\uc5d0\u00a0\uc801\ud569\ud55c\u00a0\uc218\ub2e8\uc774\ub2e4.\u00a0\ubcf4\ub2e4\u00a0\uc587\uc740\u00a0\uc811\uc774\uc2dd\u00a0\uc18c\uc7ac\ub294\u00a0\ub354\u00a0\uc720\uc5f0\ud55c\u00a0\uc0ac\uc6a9\uc774\u00a0\uac00\ub2a5\ud55c\u00a0\ub354\u00a0\uc791\uc740\u00a0\uc7a5\uce58\uc758\u00a0\uc81c\uc791\uc73c\ub85c\u00a0\uc774\uc5b4\uc9c4\ub2e4.\u00a0\uadf8\ub7ec\ub098\u00a0\uc774\uc640\u00a0\ub3d9\uc2dc\uc5d0\u00a0\ub85c\ubd07\uc758\u00a0\uae30\ub2a5\uc5d0\u00a0\ud575\uc2ec\uc801\uc778\u00a0\uc804\ub3c4\uc131,\u00a0\ub2e8\ub2e8\ud568,\u00a0\uc720\uc5f0\ud568\uc744\u00a0\uc720\uc9c0\ud560\u00a0\uc218\u00a0\uc788\uc5b4\uc57c\u00a0\ud55c\ub2e4.<\/p>\n \uc774\ubc88\u00a0\uc5f0\uad6c\uc5d0\uc11c\ub294\u00a02D\u00a0\uc6d0\uc790\u00a0\ub9c9\uc744\u00a0\uc811\uc774\uc2dd\u00a0\uc18c\uc7ac\ub85c\u00a0\ud65c\uc6a9\ud568\uc73c\ub85c\uc368\u00a0\uc885\uc774\uc811\uae30\uc2dd\u00a0\uc81c\uc791\ubc95\uc744\u00a0\ud55c\u00a0\ub2e8\uacc4\u00a0\ub354\u00a0\ubc1c\uc804\uc2dc\ucf30\ub2e4.\u00a0\uc2dc\uc81c\ud488\u00a0\uc81c\uc791\u00a0\uacfc\uc815\uc5d0\uc11c\u00a0\uc5f0\uad6c\uc9c4\uc740\u00a0\uadf8\ub798\ud540\u00a0\uc2dc\ud2b8\ub97c\u00a0\ub098\ub178\ubbf8\ud130\u00a0\ub450\uaed8\uc758\u00a0\uc720\ub9ac\uc5d0\u00a0\ubd80\ucc29\ud574\u00a0\ub9e4\uc6b0\u00a0\uc587\uc740\u00a0\ubc14\uc774\ubaa8\ud504\u00a0\uad6c\ub3d9\uae30\ub97c\u00a0\ub9cc\ub4e4\uc5c8\ub2e4.\u00a0\uc774\u00a0\uad6c\ub3d9\uae30\ub294\u00a0\uc791\uc740\u00a0\uc555\ub825\u00a0\ucc28\uc774\ub9cc\uc774\u00a0\uc874\uc7ac\ud558\ub294\u00a0\uacbd\uc6b0\uc5d0\ub3c4\u00a0\uc218\u00a0\ub9c8\uc774\ud06c\ub85c\ubbf8\ud130(nm)\u00a0\ubc18\uc9c0\ub984\uc758\u00a0\uace1\uc120\u00a0\ud615\ud0dc\ub85c\u00a0\ud718\uc5b4\uc9c4\ub2e4.<\/p>\n \uc791\uc6a9\ud558\ub294\u00a0\uc555\ub825\uc774\u00a0\uc7a5\uce58\uc758\u00a0\ud30c\uad34\u00a0\ud55c\ub3c4\ubcf4\ub2e4\u00a0\ub9e4\uc6b0\u00a0\uc791\uae30\u00a0\ub54c\ubb38\uc5d0\u00a0\uad6c\uc870\u00a0\uc804\uccb4\uc758\u00a0\uc804\ub3c4\uc131\uc774\u00a0\uc720\uc9c0\ub41c\ub2e4.\u00a0\ubc14\uc774\ubaa8\ud504\u00a0\uc704\uc5d0\u00a0\ub450\u00a0\uac1c\uc758\u00a0\ub9c8\uc774\ud06c\ub85c\ubbf8\ud130\u00a0\ub450\uaed8\u00a0\ud328\ub110\uc744\u00a0\uc0c8\uae40\uc73c\ub85c\uc368\u00a0\uadf8\u00a0\uc774\uc678\u00a0\ubd80\ubd84\ub9cc\uc774\u00a0\ud718\uc5b4\uc9c0\ub3c4\ub85d\u00a0\ud560\u00a0\uc218\u00a0\uc788\uace0,\u00a0\uc774\uc5d0\u00a0\ub530\ub77c\u00a0\uad6c\uc870\uac00\u00a0\uc811\ud788\ub3c4\ub85d\u00a0\ub9cc\ub4e4\u00a0\uc218\u00a0\uc788\ub2e4.\u00a0\uadf8\ub798\ud540\u00a0\ubc14\uc774\ubaa8\ud504\ub294\u00a0\ub9e4\uc6b0\u00a0\uc587\uc74c\uc5d0\ub3c4\u00a0\ubd88\uad6c\ud558\uace0\u00a0\ud328\ub110\uc744\u00a0\ub4e4\uc5b4\u00a0\uc62c\ub9b4\u00a0\uc218\u00a0\uc788\ub2e4.\u00a0\ud55c\ud3b8,\u00a0\uace0\uc815\ub41c\u00a0\ud328\ub110\uc758\u00a0\ubb34\uac8c\ub294\u00a0500nm\u00a0\ub450\uaed8\uc758\u00a0\uc2e4\ub9ac\ucf58\u00a0\uce69\uacfc\u00a0\uc720\uc0ac\ud558\ub2e4.<\/p>\n \uc5f0\uad6c\uc9c4\u00a0\uc911\u00a0\ud55c\u00a0\uba85\uc778\u00a0\uc774\ud0c0\uc774\u00a0\ucf54\ud5e8\uc740\u00a0\u201c\uc778\uac04\uc758\u00a0\uc138\ud3ec\u00a0\ud558\ub098\u00a0\ud06c\uae30\uc758\u00a0\uc7a5\uce58\uc5d0\u00a0\ubcf4\uc774\uc800\u00a0\uc6b0\uc8fc\uc120\u00a0\uc218\uc900\uc758\u00a0\uacc4\uc0b0\u00a0\ub2a5\ub825\uc744\u00a0\ubd80\uc5ec\ud560\u00a0\uc218\u00a0\uc788\ub2e4\u201d\uace0\u00a0\uc5b8\uae09\ud588\ub2e4.\u00a0\uadf8\ub7ec\ub098\u00a0\ucf54\ud5e8\uc740\u00a0\uc774\ub97c\u00a0\uc5b4\ub514\uc5d0\u00a0\ud65c\uc6a9\ud560\u00a0\uc218\u00a0\uc788\uc744\uc9c0\uc5d0\u00a0\uc758\ubb38\uc744\u00a0\uc81c\uae30\ud588\ub2e4.<\/p>\n \ud55c\ud3b8,\u00a0\ub3d9\ub8cc\u00a0\uc5f0\uad6c\uc6d0\uc774\uc790\u00a0\ubb3c\ub9ac\u00a0\uacfc\ud559\ubd80\uc758\u00a0\uc874\u00a0A.\u00a0\ub274\uba3c\u00a0\uad50\uc218\uc774\uba70,\u00a0\ucf54\ub12c\uc758\u00a0\uce74\ubc1c\ub9ac\u00a0\ub098\ub178\u00a0\uacfc\ud559\u00a0\uc5f0\uad6c\uc18c\u00a0\uc18c\uc7a5\uc774\uae30\ub3c4\u00a0\ud55c\u00a0\ud3f4\u00a0\ub9e5\uc5d0\uc6b0\uc5d4\uc774\u00a0\ucf54\ud5e8\uc758\u00a0\uc758\ubb38\uc5d0\u00a0\ub2f5\ud588\ub2e4.\u00a0\ub9e5\uc5d0\uc6b0\uc5d4\uc740\u00a0\u201c\ub9ce\uc740\u00a0\uc591\uc758\u00a0\uc815\ubcf4\ub97c\u00a0\ucc98\ub9ac\ud560\u00a0\uc218\u00a0\uc788\ub294\u00a0\uc18c\ud615\u00a0\ucef4\ud4e8\ud130\u00a0\uce69\uc744\u00a0\uc81c\uc791\ud560\u00a0\uc218\ub294\u00a0\uc788\uc9c0\ub9cc,\u00a0\ubb3c\uccb4\ub97c\u00a0\uc6c0\uc9c1\uc774\uac70\ub098\u00a0\uad6c\uc870\ub97c\u00a0\ud718\uac8c\u00a0\ud558\ub294\u00a0\ub2a5\ub825\uc744\u00a0\uac00\uc9c0\uace0\u00a0\uc788\uc9c0\u00a0\uc54a\ub2e4\ub294\u00a0\uc810\uc774\u00a0\ubb38\uc81c\u201d\ub77c\uace0\u00a0\uc5b8\uae09\ud588\ub2e4.<\/p>\n \ubc14\uc774\ubaa8\ud504\u00a0<\/b><\/span><\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n <\/p>\n <\/p>\n \uc5f0\uad6c\uc6d0\ub4e4\uc774\u00a0\uac1c\ubc1c\ud55c\u00a0\uc774\u00a0\uc2e4\ud5d8\uc801\uc778\u00a0\ub85c\ubd07\uc740\u00a0\ubc14\uc774\ubaa8\ud504\ub77c\ub294\u00a0\ubaa8\ud130\ub97c\u00a0\uc0ac\uc6a9\ud574\u00a0\uc6c0\uc9c1\uc784\uc5d0\u00a0\ud544\uc694\ud55c\u00a0\ucd94\uc9c4\ub825\uc744\u00a0\uc5bb\ub294\ub2e4.\u00a0\ubc14\uc774\ubaa8\ud504\ub294\u00a0\uae30\ubcf8\uc801\uc73c\ub85c\u00a0\uadf8\ub798\ud540\uacfc\u00a0\uc720\ub9ac\uc640\u00a0\uac19\uc774\u00a0\uc5f4,\u00a0\uc804\uc555\u00a0\uc778\uac00,\u00a0\ud654\ud559\u00a0\ubc18\uc751\u00a0\ub4f1\uc758\u00a0\ubb3c\ub9ac\uc801\u00a0\uc694\uc778\uc5d0\u00a0\ub530\ub77c\u00a0\ud718\uc5b4\uc9c0\ub294\u00a0\ub450\u00a0\uc885\ub958\uc758\u00a0\uc18c\uc7ac\ub97c\u00a0\ud569\uce5c\u00a0\uad6c\uc870\ub2e4.\u00a0\uc608\ub97c\u00a0\ub4e4\uc5b4,\u00a0\uc5f4\uc5d0\u00a0\ub300\ud574\u00a0\uc11c\ub85c\u00a0\ub2e4\ub978\u00a0\ubc18\uc751\uc744\u00a0\ubcf4\uc774\ub294\u00a0\uc18c\uc7ac\uac00\u00a0\uacb0\ud569\ub41c\u00a0\uad6c\uc870\uc5d0\u00a0\uc5f4\uc744\u00a0\uac00\ud560\u00a0\uacbd\uc6b0\u00a0\ub450\u00a0\ubb3c\uc9c8\uc774\u00a0\ub2e4\ub974\uac8c\u00a0\ud33d\ucc3d\ud558\uae30\u00a0\ub54c\ubb38\uc5d0\u00a0\ud615\ud0dc\uac00\u00a0\ubcc0\ud654\ud55c\ub2e4.<\/p>\n \uc11c\ub85c\u00a0\ub2e4\ub978\u00a0\uc5f4\u00a0\uc751\ub2f5\u00a0\uacc4\uc218\ub85c\ubd80\ud130\u00a0\ubc1c\uc0dd\ud558\ub294\u00a0\uc555\ub825\uc744\u00a0\ud574\uc18c\ud558\uae30\u00a0\uc704\ud574\u00a0\ubc14\uc774\ubaa8\ud504\ub294\u00a0\ud718\uc5b4\uc9c0\uace0,\u00a0\uc774\ub294\u00a0\ud55c\u00a0\uce35\uc774\u00a0\ub2e4\ub978\u00a0\uce35\ubcf4\ub2e4\u00a0\ub354\u00a0\uae38\uac8c\u00a0\ub298\uc5b4\ub098\ub294\u00a0\uacb0\uacfc\ub85c\u00a0\uc774\uc5b4\uc9c4\ub2e4.\u00a0\uacbd\uc9c1\ub41c\u00a0\ud3b8\ud3c9\ud55c\u00a0\ud328\ub110\uc744\u00a0\ub3c4\uc785\ud568\uc73c\ub85c\uc368\u00a0\ud718\uc5b4\uc9d0\uc774\u00a0\ud2b9\uc815\u00a0\uc601\uc5ed\uc5d0\uc11c\ub9cc\u00a0\ubc1c\uc0dd\ud558\ub3c4\ub85d\u00a0\ud560\u00a0\uc218\u00a0\uc788\uace0,\u00a0\uc774\uc5d0\u00a0\ub530\ub77c\u00a0\uad6c\uc870\uac00\u00a0\uc811\ud788\uac8c\u00a0\ub41c\ub2e4.\u00a0\uc774\ub7ec\ud55c\u00a0\ubc29\uc2dd\uc73c\ub85c\u00a0\uc0bc\uac01\u00a0\ud53c\ub77c\ubbf8\ub4dc\ub098\u00a0\uc815\uc721\uba74\uccb4\u00a0\ub4f1\u00a0\ub2e4\uc591\ud55c\u00a0\ud615\ud0dc\uc758\u00a0\uc811\uc774\uc2dd\u00a0\uad6c\uc870\ub97c\u00a0\ub9cc\ub4e4\u00a0\uc218\u00a0\uc788\ub2e4.<\/p>\n \uc720\ub9ac\uc640\u00a0\uadf8\ub798\ud540\uc73c\ub85c\u00a0\ub9cc\ub4e4\uc5b4\uc9c4\u00a0\ubc14\uc774\ubaa8\ud504\ub294\u00a0\uc720\ub9ac\uc5d0\u00a0\ub2e4\ub7c9\uc758\u00a0\ud070\u00a0\uc774\uc628\uc744\u00a0\uc8fc\uc785\ud574\u00a0\ud33d\ucc3d\uc2dc\ud0a4\ub294\u00a0\ud654\ud559\uc801\u00a0\uc790\uadf9\uc5d0\u00a0\uc758\ud574\uc11c\ub3c4\u00a0\uc811\ud78c\ub2e4.\u00a0\uc77c\ubc18\uc801\uc73c\ub85c\u00a0\uc774\ub7ec\ud55c\u00a0\ud654\ud559\uc801\u00a0\ubc18\uc751\uc740\u00a0\uc774\uc628\u00a0\uc6a9\uc561\uc774\ub098\u00a0\ud3c9\ubc94\ud55c\u00a0\ubb3c\uc5d0\u00a0\ub2f4\uac14\uc744\u00a0\ub54c\u00a0\uc720\ub9ac\uc758\u00a0\ud45c\uba74\uc5d0\uc11c\u00a0\uc77c\uc5b4\ub09c\ub2e4.\u00a0\ubc14\uc774\ubaa8\ud504\ub294\u00a0\ub9e4\uc6b0\u00a0\uc587\uae30\u00a0\ub54c\ubb38\uc5d0\u00a0\uc720\ub9ac\uc758\u00a0\ubc18\uc751\uc131\u00a0\uc5ed\uc2dc\u00a0\ub9e4\uc6b0\u00a0\ub192\ub2e4.<\/p>\n \ubc14\uc774\ubaa8\ud504\ub97c\u00a0\ub9cc\ub4e4\uae30\u00a0\uc704\ud574\u00a0\uc5f0\uad6c\uc9c4\uc740\u00a0\uc6d0\uc790\uce35\u00a0\uc99d\ucc29(Atomic\u00a0Layer\u00a0Deposition)\uc73c\ub85c\u00a0\uc54c\ub824\uc9c4\u00a0\uae30\ubc95\uc744\u00a0\uc0ac\uc6a9\ud574\u00a0\uc6d0\uc790\u00a0\ub450\uaed8\uc758\u00a0\uc774\uc0b0\ud654\u00a0\uc2e4\ub9ac\ucf58\uc744\u00a0\ucee4\ubc84\uc2ac\ub9bd\u00a0\uc704\uc758\u00a0\uc54c\ub8e8\ubbf8\ub284\u00a0\uc704\uc5d0\u00a0\ud654\ud559\uc801\u00a0\ubc29\ubc95\uc73c\ub85c\u00a0\uce60\ud588\ub2e4.\u00a0\uadf8\u00a0\ud6c4\u00a0\ud574\ub2f9\u00a0\uce35\u00a0\uc704\uc5d0\u00a0\uc6d0\uc790\u00a0\ud55c\u00a0\uacb9\uc758\u00a0\uadf8\ub798\ud540\uc744\u00a0\uc2b5\uc2dd\u00a0\uae30\ubc95\uc73c\ub85c\u00a0\uc62c\ub824\uc11c\u00a0\ube44\uad50\ud560\u00a0\uc218\u00a0\uc5c6\uc744\u00a0\uc815\ub3c4\ub85c\u00a0\uc587\uc740\u00a0\ubc14\uc774\ubaa8\ud504\ub97c\u00a0\ub9cc\ub4e4\uc5b4\ub0c8\ub2e4.<\/p>\n \uc5f0\uad6c\uc9c4\uc774\u00a0\uc0ac\uc6a9\ud55c\u00a0\ud55c\u00a0\uae30\uacc4\uc758\u00a0\ud06c\uae30\ub294\u00a0\uc801\ud608\uad6c\uc758\u00a0\uc138\u00a0\ubc30\u00a0\ubc16\uc5d0\u00a0\ub418\uc9c0\u00a0\uc54a\ub294\u00a0\uac83\uc73c\ub85c\u00a0\uc54c\ub824\uc838\u00a0\uc788\ub2e4.\u00a0\uc811\ud614\uc744\u00a0\uacbd\uc6b0\uc5d0\ub294\u00a0\ub300\ud615\u00a0\uc2e0\uacbd\u00a0\uc138\ud3ec\ubcf4\ub2e4\u00a0\ud55c\ucc38\u00a0\uc791\uc740\u00a0\ud06c\uae30\ub2e4.\u00a0\uc774\uc804\uc5d0\ub3c4\u00a0\ube44\uc2b7\ud55c\u00a0\ud06c\uae30\uc758\u00a0\uc811\uc774\uc2dd\u00a0\ud2c0\uc774\u00a0\uc81c\uc791\ub41c\u00a0\uc801\uc740\u00a0\uc788\uc9c0\ub9cc,\u00a0\uc5f0\uad6c\uc9c4\uc740\u00a0\ubc1c\uba85\ud488\uc774\u00a0\ubc18\ub3c4\uccb4\uc758\u00a0\uc81c\uc791\uacfc\u00a0\ud638\ud658\uac00\ub2a5\ud558\ub2e4\ub294\u00a0\ubd84\uba85\ud55c\u00a0\uc7a5\uc810\uc774\u00a0\uc788\ub2e4\uace0\u00a0\uc8fc\uc7a5\ud588\ub2e4.\u00a0\ucf54\ud5e8\uc740\u00a0\uc774\u00a0\uae30\uacc4\ub4e4\uc774\u00a0\ub098\ub178\u00a0\uaddc\ubaa8\uc758\u00a0\ub85c\ubd07\u00a0\uacf5\ud559\uc5d0\u00a0\ub300\ud55c\u00a0\uc5f0\uad6c\uc790\uc758\u00a0\ube44\uc804\uc5d0\ub3c4\u00a0\uc801\ud569\ud558\ub2e4\uace0\u00a0\ucd94\uac00\ub85c\u00a0\uc5b8\uae09\ud588\ub2e4.<\/p>\n 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